Trimming A by 24 35, reference by 24 35 Angle = -4.41, increment = 0.59, shift = 21.5 2.1 pixels, 0.270 um Y Trimming A by 24 35, reference by 24 35 Angle = -3.23, increment = 1.78, shift = 62.6 8.4 pixels, 0.792 um Y Trimming A by 24 35, reference by 24 35 Angle = -0.52, increment = 4.49, shift = 156.8 25.4 pixels, 1.996 um Y Rough eucentricity: changing Z by -25.53 to -90.47, continuing... Trimming A by 24 35, reference by 24 35 Angle = 3.96, increment = 4.48, shift = 2.8 -6.8 pixels, 0.017 um Y Trimming A by 24 35, reference by 24 35 Angle = 7.47, increment = 7.99, shift = 3.9 -7.2 pixels, 0.030 um Y Rough eucentricity: changing Z by -0.21 to -90.68, finished. Measured defocus = -5.60 microns drift = 0.20 nm/sec Trimming A by 24 35, reference by 24 35 Angle = -4.41, increment = 0.60, shift = -26.1 -7.2 pixels, -0.340 um Y Trimming A by 24 35, reference by 24 35 Angle = -3.21, increment = 1.79, shift = -76.8 -18.9 pixels, -0.994 um Y Trimming A by 24 35, reference by 24 35 Angle = -1.40, increment = 3.60, shift = -156.8 -36.9 pixels, -2.025 um Y Rough eucentricity: changing Z by 32.26 to -58.44, continuing... Trimming A by 20 30 30 20, reference by 20 30 30 20 Angle = 2.20, increment = 3.60, shift = 9.0 -5.3 pixels, 0.098 um Y Trimming A by 24 35, reference by 24 35 Angle = 6.59, increment = 7.99, shift = 24.9 -3.2 pixels, 0.298 um Y Rough eucentricity: changing Z by -2.14 to -60.58, finished. Trimming A by 24 35, reference by 24 35 Angle = -4.41, increment = 0.60, shift = 7.7 0.1 pixels, 0.096 um Y Trimming A by 24 35, reference by 24 35 Angle = -3.21, increment = 1.79, shift = 24.6 1.8 pixels, 0.307 um Y Trimming A by 24 35, reference by 24 35 Angle = 0.36, increment = 5.37, shift = 71.9 9.4 pixels, 0.909 um Y Trimming A by 24 35, reference by 24 35 Angle = 2.99, increment = 7.99, shift = 108.4 15.9 pixels, 1.375 um Y Rough eucentricity: changing Z by -9.87 to -70.47, finished. Trimming A by 24 35, reference by 24 35 Angle = -4.41, increment = 0.60, shift = 4.8 -0.2 pixels, 0.059 um Y Trimming A by 24 35, reference by 24 35 Angle = -3.22, increment = 1.79, shift = 15.9 0.5 pixels, 0.197 um Y Trimming A by 24 35, reference by 24 35 Angle = 0.36, increment = 5.36, shift = 47.5 5.9 pixels, 0.600 um Y Trimming A by 24 35, reference by 24 35 Angle = 2.99, increment = 8.00, shift = 74.6 9.8 pixels, 0.943 um Y Rough eucentricity: changing Z by -6.76 to -77.24, finished. Refine ZLP: additional offset = 0.1 eV; total offset = 0.1 eV Measured defocus = 3.83 microns drift = 2.75 nm/sec Measured defocus = -5.36 microns drift = 0.02 nm/sec Trimming A by 30 35, reference by 30 35 Angle = -4.40, increment = 0.60, shift = -6.8 -2.3 pixels, -0.089 um Y Trimming A by 30 35, reference by 30 35 Angle = -3.21, increment = 1.79, shift = -20.2 -7.2 pixels, -0.267 um Y Trimming A by 30 35, reference by 30 35 Angle = 0.36, increment = 5.37, shift = -61.3 -16.7 pixels, -0.797 um Y Trimming A by 30 35, reference by 30 35 Angle = 2.99, increment = 8.00, shift = -88.8 -23.4 pixels, -1.154 um Y Rough eucentricity: changing Z by 8.28 to -68.98, finished. Measured defocus = -14.80 microns drift = 0.17 nm/sec Measured defocus = -6.27 microns drift = 0.02 nm/sec Trimming A by 24 35, reference by 24 35 Angle = -4.41, increment = 0.60, shift = -16.1 -6.1 pixels, -0.214 um Y Trimming A by 24 35, reference by 24 35 Angle = -3.21, increment = 1.79, shift = -47.6 -12.5 pixels, -0.619 um Y Trimming A by 24 35, reference by 24 35 Angle = 0.36, increment = 5.37, shift = -142.9 -32.0 pixels, -1.842 um Y Rough eucentricity: changing Z by 19.68 to -49.30, continuing... Trimming A by 24 35, reference by 24 35 Angle = 5.72, increment = 5.36, shift = 5.3 -7.1 pixels, 0.047 um Y Trimming A by 24 35, reference by 24 35 Angle = 8.36, increment = 7.99, shift = 6.5 -7.6 pixels, 0.060 um Y Rough eucentricity: changing Z by -0.43 to -49.74, finished. Trimming A by 24 35, reference by 24 35 Angle = -4.41, increment = 0.60, shift = -3.4 -1.9 pixels, -0.047 um Y Trimming A by 24 35, reference by 24 35 Angle = -3.22, increment = 1.79, shift = -9.0 -5.0 pixels, -0.124 um Y Trimming A by 24 35, reference by 24 35 Angle = 0.36, increment = 5.36, shift = -28.4 -9.4 pixels, -0.374 um Y Trimming A by 24 35, reference by 24 35 Angle = 2.99, increment = 8.00, shift = -38.9 -12.7 pixels, -0.512 um Y Rough eucentricity: changing Z by 3.67 to -46.08, finished. Measured defocus = -6.49 microns drift = 0.22 nm/sec Trimming A by 24 35, reference by 24 35 Angle = -4.41, increment = 0.60, shift = -26.8 -7.5 pixels, -0.350 um Y Trimming A by 24 35, reference by 24 35 Angle = -3.21, increment = 1.79, shift = -79.1 -18.8 pixels, -1.022 um Y Trimming A by 24 35, reference by 24 35 Angle = -1.50, increment = 3.50, shift = -158.6 -37.2 pixels, -2.048 um Y Rough eucentricity: changing Z by 33.60 to -12.49, continuing... Trimming A by 24 24 35 20, reference by 24 24 35 20 Angle = 1.99, increment = 3.50, shift = 8.5 -5.7 pixels, 0.090 um Y Trimming A by 24 35, reference by 24 35 Angle = 6.49, increment = 7.99, shift = 21.3 -5.2 pixels, 0.248 um Y Rough eucentricity: changing Z by -1.78 to -14.27, finished. Measured defocus = -8.94 microns drift = 1.65 nm/sec Min = 78.0, max = 1303.0, mean = 463.39, SD = 87.16 Pixel size = 0.674 nm 5.368 electrons (115.85 counts) per unbinned pixel per second Min = -20.0, max = 639.0, mean = 231.85, SD = 61.59 Pixel size = 0.674 nm 4.477 electrons (96.60 counts) per unbinned pixel per second Min = -38.0, max = 644.0, mean = 51.32, SD = 29.65 Pixel size = 0.674 nm 0.991 electrons (21.39 counts) per unbinned pixel per second Min = -65.0, max = 627.0, mean = 73.91, SD = 35.53 Pixel size = 0.674 nm 1.427 electrons (30.80 counts) per unbinned pixel per second Min = -54.0, max = 659.0, mean = 110.95, SD = 43.30 Pixel size = 0.674 nm 2.142 electrons (46.23 counts) per unbinned pixel per second Min = -37.0, max = 667.0, mean = 173.63, SD = 53.68 Pixel size = 0.674 nm 3.352 electrons (72.34 counts) per unbinned pixel per second Min = -15.0, max = 697.0, mean = 243.50, SD = 62.98 Pixel size = 0.674 nm 4.701 electrons (101.46 counts) per unbinned pixel per second Min = -11.0, max = 622.0, mean = 250.04, SD = 63.76 Pixel size = 0.674 nm 4.828 electrons (104.19 counts) per unbinned pixel per second Min = 43.0, max = 808.0, mean = 367.68, SD = 75.97 Pixel size = 0.674 nm 7.099 electrons (153.20 counts) per unbinned pixel per second Min = 78.0, max = 1044.0, mean = 545.77, SD = 89.89 Pixel size = 0.674 nm 10.538 electrons (227.41 counts) per unbinned pixel per second Min = 142.0, max = 1075.0, mean = 563.63, SD = 91.02 Pixel size = 0.674 nm 10.883 electrons (234.85 counts) per unbinned pixel per second Angle = 24.00, shift = 0.0, 0.0 pixels, 0.000, 0.000 um, IS = -0.007, -0.017 Angle = 18.00, shift = -10.4, -2.3 pixels, -0.001, -0.134 um, IS = -0.006, 0.118 Angle = 11.00, shift = -15.7, -2.4 pixels, 0.011, -0.200 um, IS = -0.017, 0.318 Angle = 4.00, shift = -21.1, -2.9 pixels, 0.019, -0.267 um, IS = -0.036, 0.585 Angle = -4.00, shift = -24.8, -3.3 pixels, 0.023, -0.313 um, IS = -0.059, 0.898 Angle = -11.00, shift = -18.6, -2.6 pixels, 0.016, -0.235 um, IS = -0.075, 1.133 Angle = -18.00, shift = -10.2, -0.8 pixels, 0.017, -0.127 um, IS = -0.092, 1.261 Angle = -24.00, shift = -9.4, -0.7 pixels, 0.016, -0.118 um, IS = -0.108, 1.379 General solution delZ 1.82, delY 0.01, yZero 0.74 solution with assumed YZero 0.74: delZ 1.82, delY 0.05 Refining eucentricity: Fit to 8 positions gives tilt axis Z displacement of 1.82 microns and lateral displacement of -0.01 microns Min = -46.0, max = 627.0, mean = 157.88, SD = 52.97 Pixel size = 0.674 nm 3.658 electrons (78.94 counts) per unbinned pixel per second Beam was shifted 1.093 microns Beam was shifted 0.048 microns Beam was shifted 0.145 microns Beam was shifted 0.115 microns Beam was shifted 0.174 microns Beam was shifted 0.239 microns Need regular tracking - Need autofocus Tracking image shifted 0.019, -0.007 um; position -0.284, 0.104 Measured defocus = -1.41 microns drift = 0.30 nm/sec Trimming A by 20 20 25 20, reference by 20 20 20 20 Tracking image shifted -0.007, -0.003 um; position -0.277, 0.107 Saved Z = 0 at 0.00 min Tilt = 60.00 Mean = 243 IA = 3.67um dose = 0.66 e/A2 X/Y/Z = -0.277 0.107 2.528 Need regular tracking - Need autofocus Trimming A by 20 25, reference by 20 20 Tracking image shifted 0.005, 0.015 um; position -0.282, 0.092 Measured defocus = -3.93 microns drift = 0.19 nm/sec Trimming A by 20 25, reference by 20 20 Tracking image shifted -0.002, -0.002 um; position -0.280, 0.094 Trimming A by 19 19, reference by 74 74 Record image shifted 0.001, -0.030 um Tracking reference shifted by -10.8,2.1 pixels, 0.001,-0.030 um Saved Z = 1 at 0.50 min Tilt = 58.00 Mean = 227 IA = 3.78um dose = 0.62 e/A2 X/Y/Z = -0.280 0.123 2.450 Predicted X = -0.283 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Y = 0.140 StdErr = 0.000 nFit = 2 nDrop = 0 Predicted Z = 2.373 StdErr = 0.000 nFit = 2 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 25, reference by 20 20 Tracking image shifted -0.001, 0.053 um; position -0.283, 0.087 Measured defocus = -3.79 microns drift = 0.21 nm/sec Trimming A by 25 25, reference by 20 20 Tracking image shifted -0.003, -0.002 um; position -0.279, 0.089 Record image shifted 0.001, -0.029 um Tracking reference shifted by -10.6,1.8 pixels, 0.001,-0.029 um Saved Z = 2 at 0.91 min Tilt = 56.00 Mean = 228 IA = 3.88um dose = 0.59 e/A2 X/Y/Z = -0.281 0.118 2.164 Errors in X/Y Prediction 0.003 -0.022 um, 0.2 1.8 % Error in Z Prediction -0.210 Predicted X = -0.283 StdErr = 0.002 nFit = 3 nDrop = 0 Predicted Y = 0.127 StdErr = 0.016 nFit = 3 nDrop = 0 Predicted Z = 2.017 StdErr = 0.156 nFit = 3 nDrop = 0 Need autofocus Measured defocus = -3.96 microns drift = 0.18 nm/sec Record image shifted -0.003, 0.025 um Saved Z = 3 at 1.28 min Tilt = 54.00 Mean = 253 IA = 3.97um dose = 0.56 e/A2 X/Y/Z = -0.280 0.102 1.981 Errors in X/Y Prediction 0.003 -0.025 um, 0.2 2.0 % Error in Z Prediction -0.036 Predicted X = -0.280 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = 0.092 StdErr = 0.008 nFit = 3 nDrop = 0 Predicted Z = 1.729 StdErr = 0.077 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 30, reference by 20 20 Tracking image shifted 0.001, 0.059 um; position -0.281, 0.033 Measured defocus = -4.31 microns drift = 0.18 nm/sec Redoing Autofocus because measured defocus is too far from prediction Measured defocus = -4.01 microns drift = 0.13 nm/sec Trimming A by 25 30, reference by 20 20 Tracking image shifted -0.003, -0.003 um; position -0.278, 0.036 Record image shifted 0.002, -0.046 um Tracking reference shifted by -16.7,3.0 pixels, 0.002,-0.046 um Saved Z = 4 at 1.79 min Tilt = 52.00 Mean = 223 IA = 4.06um dose = 0.54 e/A2 X/Y/Z = -0.279 0.081 2.051 Errors in X/Y Prediction 0.001 -0.011 um, 0.0 0.9 % Error in Z Prediction 0.323 Predicted X = -0.278 StdErr = 0.000 nFit = 3 nDrop = 0 Predicted Y = 0.064 StdErr = 0.003 nFit = 3 nDrop = 0 Predicted Z = 1.953 StdErr = 0.189 nFit = 3 nDrop = 0 Need autofocus Measured defocus = -4.34 microns drift = 0.19 nm/sec Redoing Autofocus because measured defocus is too far from prediction Measured defocus = -4.20 microns drift = 0.11 nm/sec Record image shifted 0.000, 0.043 um Saved Z = 5 at 2.27 min Tilt = 50.00 Mean = 247 IA = 4.16um dose = 0.51 e/A2 X/Y/Z = -0.278 0.020 2.492 Errors in X/Y Prediction -0.000 -0.043 um, 0.0 3.5 % Error in Z Prediction 0.539 Predicted X = -0.278 StdErr = 0.000 nFit = 3 nDrop = 0 Predicted Y = -0.054 StdErr = 0.025 nFit = 4 nDrop = 0 Predicted Z = 2.686 StdErr = 0.276 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 30, reference by 20 25 Tracking image shifted 0.001, 0.040 um; position -0.279, -0.093 Measured defocus = -3.89 microns drift = 0.21 nm/sec Trimming A by 25 30, reference by 20 25 Tracking image shifted -0.004, -0.001 um; position -0.276, -0.092 Record image shifted 0.001, -0.040 um Tracking reference shifted by -14.6,2.8 pixels, 0.001,-0.040 um Saved Z = 6 at 2.68 min Tilt = 48.00 Mean = 224 IA = 4.26um dose = 0.49 e/A2 X/Y/Z = -0.276 -0.052 2.578 Errors in X/Y Prediction 0.001 0.002 um, 0.1 0.1 % Error in Z Prediction -0.108 Predicted X = -0.275 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.148 StdErr = 0.014 nFit = 5 nDrop = 0 Predicted Z = 2.834 StdErr = 0.182 nFit = 4 nDrop = 0 Need autofocus Measured defocus = -4.08 microns drift = 0.18 nm/sec Record image shifted 0.001, -0.046 um Saved Z = 7 at 3.05 min Tilt = 46.00 Mean = 220 IA = 4.35um dose = 0.48 e/A2 X/Y/Z = -0.276 -0.102 2.912 Errors in X/Y Prediction -0.001 0.046 um, 0.1 3.7 % Error in Z Prediction 0.078 Predicted X = -0.275 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.189 StdErr = 0.033 nFit = 5 nDrop = 0 Predicted Z = 3.119 StdErr = 0.142 nFit = 5 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 24 35, reference by 25 25 Tracking image shifted 0.002, -0.005 um; position -0.277, -0.183 Measured defocus = -4.56 microns drift = 0.21 nm/sec Redoing Autofocus because measured defocus is too far from prediction Measured defocus = -3.74 microns drift = 0.24 nm/sec Trimming A by 25 30, reference by 25 25 Tracking image shifted -0.004, -0.003 um; position -0.273, -0.180 Record image shifted 0.002, -0.037 um Tracking reference shifted by -13.5,2.1 pixels, 0.002,-0.037 um Saved Z = 8 at 3.56 min Tilt = 44.00 Mean = 221 IA = 4.44um dose = 0.46 e/A2 X/Y/Z = -0.275 -0.144 3.417 Errors in X/Y Prediction -0.001 0.045 um, 0.0 3.6 % Error in Z Prediction 0.298 Predicted X = -0.275 StdErr = 0.000 nFit = 3 nDrop = 0 Predicted Y = -0.181 StdErr = 0.014 nFit = 5 nDrop = 0 Predicted Z = 3.557 StdErr = 0.182 nFit = 6 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 30, reference by 25 30 Tracking image shifted 0.003, 0.020 um; position -0.278, -0.200 Measured defocus = -4.25 microns drift = 0.18 nm/sec Redoing Autofocus because measured defocus is too far from prediction Measured defocus = -4.05 microns drift = 0.13 nm/sec Trimming A by 25 30, reference by 25 30 Tracking image shifted -0.004, -0.003 um; position -0.274, -0.197 Record image shifted 0.001, -0.019 um Tracking reference shifted by -6.9,1.2 pixels, 0.001,-0.019 um Saved Z = 9 at 4.07 min Tilt = 42.00 Mean = 224 IA = 4.52um dose = 0.44 e/A2 X/Y/Z = -0.274 -0.179 3.853 Errors in X/Y Prediction 0.000 0.002 um, 0.0 0.2 % Error in Z Prediction 0.296 Predicted X = -0.273 StdErr = 0.000 nFit = 3 nDrop = 0 Predicted Y = -0.196 StdErr = 0.008 nFit = 5 nDrop = 0 Predicted Z = 4.273 StdErr = 0.083 nFit = 4 nDrop = 2 Need autofocus Measured defocus = -3.43 microns drift = 0.19 nm/sec Redoing Autofocus because measured defocus is too far from prediction Measured defocus = -3.89 microns drift = 0.12 nm/sec Record image shifted -0.002, 0.011 um Saved Z = 10 at 4.55 min Tilt = 40.00 Mean = 230 IA = 4.59um dose = 0.43 e/A2 X/Y/Z = -0.271 -0.207 3.596 Errors in X/Y Prediction 0.002 -0.011 um, 0.2 0.9 % Error in Z Prediction -0.677 Predicted X = -0.270 StdErr = 0.002 nFit = 3 nDrop = 0 Predicted Y = -0.228 StdErr = 0.002 nFit = 5 nDrop = 0 Predicted Z = 4.126 StdErr = 0.302 nFit = 6 nDrop = 0 Need autofocus Measured defocus = -3.83 microns drift = 0.21 nm/sec Record image shifted 0.002, -0.019 um Saved Z = 11 at 4.93 min Tilt = 38.00 Mean = 221 IA = 4.66um dose = 0.42 e/A2 X/Y/Z = -0.272 -0.209 3.952 Errors in X/Y Prediction -0.002 0.019 um, 0.2 1.5 % Error in Z Prediction -0.174 Predicted X = -0.270 StdErr = 0.003 nFit = 3 nDrop = 0 Predicted Y = -0.209 StdErr = 0.012 nFit = 5 nDrop = 0 Predicted Z = 4.321 StdErr = 0.313 nFit = 6 nDrop = 0 Need autofocus Measured defocus = -3.52 microns drift = 0.21 nm/sec Redoing Autofocus because measured defocus is too far from prediction Measured defocus = -3.96 microns drift = 0.12 nm/sec Record image shifted -0.003, 0.062 um Saved Z = 12 at 5.40 min Tilt = 36.00 Mean = 236 IA = 4.72um dose = 0.41 e/A2 X/Y/Z = -0.266 -0.271 3.801 Errors in X/Y Prediction 0.003 -0.062 um, 0.3 4.9 % Error in Z Prediction -0.520 Predicted X = -0.265 StdErr = 0.004 nFit = 3 nDrop = 0 Predicted Y = -0.300 StdErr = 0.041 nFit = 5 nDrop = 0 Predicted Z = 4.168 StdErr = 0.345 nFit = 6 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 30, reference by 20 25 Tracking image shifted 0.003, 0.044 um; position -0.268, -0.345 Measured defocus = -3.92 microns drift = 0.22 nm/sec Trimming A by 25 30, reference by 20 25 Tracking image shifted -0.004, -0.003 um; position -0.264, -0.342 Record image shifted 0.001, -0.056 um Tracking reference shifted by -20.5,3.8 pixels, 0.001,-0.056 um Saved Z = 13 at 5.80 min Tilt = 34.00 Mean = 210 IA = 4.78um dose = 0.40 e/A2 X/Y/Z = -0.265 -0.285 4.082 Errors in X/Y Prediction -0.000 0.015 um, 0.0 1.2 % Error in Z Prediction -0.086 Predicted X = -0.261 StdErr = 0.003 nFit = 3 nDrop = 0 Predicted Y = -0.329 StdErr = 0.040 nFit = 5 nDrop = 0 Predicted Z = 4.285 StdErr = 0.298 nFit = 7 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 30, reference by 25 30 Tracking image shifted 0.004, 0.002 um; position -0.265, -0.331 Measured defocus = -3.82 microns drift = 0.20 nm/sec Trimming A by 25 30, reference by 25 30 Tracking image shifted -0.004, -0.002 um; position -0.261, -0.330 Record image shifted 0.001, -0.014 um Tracking reference shifted by -5.0,0.8 pixels, 0.001,-0.014 um Saved Z = 14 at 6.20 min Tilt = 32.00 Mean = 218 IA = 4.83um dose = 0.39 e/A2 X/Y/Z = -0.261 -0.316 4.107 Errors in X/Y Prediction -0.000 0.013 um, 0.0 1.1 % Error in Z Prediction -0.177 Predicted X = -0.260 StdErr = 0.004 nFit = 4 nDrop = 0 Predicted Y = -0.353 StdErr = 0.029 nFit = 6 nDrop = 0 Predicted Z = 4.157 StdErr = 0.203 nFit = 6 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 30, reference by 25 30 Tracking image shifted -0.002, 0.000 um; position -0.258, -0.353 Measured defocus = -4.04 microns drift = 0.18 nm/sec Trimming A by 25 30, reference by 25 30 Tracking image shifted -0.003, -0.002 um; position -0.255, -0.351 Record image shifted 0.000, -0.014 um Tracking reference shifted by -5.1,0.9 pixels, 0.000,-0.014 um Saved Z = 15 at 6.61 min Tilt = 30.00 Mean = 216 IA = 4.89um dose = 0.38 e/A2 X/Y/Z = -0.255 -0.338 4.193 Errors in X/Y Prediction 0.005 0.015 um, 0.4 1.2 % Error in Z Prediction 0.037 Predicted X = -0.247 StdErr = 0.000 nFit = 4 nDrop = 0 Predicted Y = -0.365 StdErr = 0.030 nFit = 6 nDrop = 0 Predicted Z = 4.251 StdErr = 0.175 nFit = 7 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 30, reference by 25 25 Tracking image shifted 0.003, 0.012 um; position -0.249, -0.377 Measured defocus = -4.02 microns drift = 0.18 nm/sec Trimming A by 25 30, reference by 25 25 Tracking image shifted -0.003, -0.001 um; position -0.246, -0.376 Record image shifted -0.000, -0.014 um Tracking reference shifted by -4.9,1.1 pixels, -0.000,-0.014 um Saved Z = 16 at 7.01 min Tilt = 28.00 Mean = 214 IA = 4.95um dose = 0.37 e/A2 X/Y/Z = -0.246 -0.363 4.270 Errors in X/Y Prediction 0.000 0.003 um, 0.0 0.2 % Error in Z Prediction 0.019 Predicted X = -0.239 StdErr = 0.002 nFit = 3 nDrop = 0 Predicted Y = -0.391 StdErr = 0.010 nFit = 5 nDrop = 1 Predicted Z = 4.325 StdErr = 0.034 nFit = 4 nDrop = 3 Record image shifted -0.004, -0.026 um Saved Z = 17 at 7.24 min Tilt = 26.00 Mean = 210 IA = 5.01um dose = 0.37 e/A2 X/Y/Z = -0.235 -0.365 4.325 Errors in X/Y Prediction 0.004 0.026 um, 0.3 2.1 % Predicted X = -0.222 StdErr = 0.001 nFit = 4 nDrop = 0 Predicted Y = -0.369 StdErr = 0.010 nFit = 5 nDrop = 1 Predicted Z = 4.390 StdErr = 0.041 nFit = 4 nDrop = 3 Need regular tracking - Trimming A by 25 25, reference by 25 25 Tracking image shifted -0.004, 0.064 um; position -0.218, -0.433 Record image shifted -0.001, -0.025 um Tracking reference shifted by -8.8,2.1 pixels, -0.001,-0.025 um Saved Z = 18 at 7.50 min Tilt = 24.00 Mean = 208 IA = 5.05um dose = 0.36 e/A2 X/Y/Z = -0.218 -0.409 4.390 Errors in X/Y Prediction 0.004 -0.039 um, 0.3 3.2 % Predicted X = -0.205 StdErr = 0.005 nFit = 3 nDrop = 0 Predicted Y = -0.433 StdErr = 0.027 nFit = 5 nDrop = 0 Predicted Z = 4.455 StdErr = 0.049 nFit = 4 nDrop = 3 Need regular tracking - Need autofocus Trimming A by 25 30, reference by 25 25 Tracking image shifted -0.007, 0.026 um; position -0.198, -0.458 Measured defocus = -4.01 microns drift = 0.22 nm/sec Trimming A by 25 30, reference by 25 25 Tracking image shifted -0.004, -0.001 um; position -0.194, -0.457 Record image shifted 0.002, -0.011 um Tracking reference shifted by -4.0,0.1 pixels, 0.002,-0.011 um Saved Z = 19 at 7.91 min Tilt = 22.00 Mean = 208 IA = 5.10um dose = 0.36 e/A2 X/Y/Z = -0.196 -0.447 4.463 Errors in X/Y Prediction 0.009 -0.014 um, 0.7 1.1 % Error in Z Prediction 0.008 Predicted X = -0.177 StdErr = 0.003 nFit = 3 nDrop = 0 Predicted Y = -0.497 StdErr = 0.024 nFit = 5 nDrop = 0 Predicted Z = 4.539 StdErr = 0.019 nFit = 4 nDrop = 0 Record image shifted -0.004, -0.019 um Saved Z = 20 at 8.14 min Tilt = 20.00 Mean = 207 IA = 5.14um dose = 0.35 e/A2 X/Y/Z = -0.173 -0.478 4.539 Errors in X/Y Prediction 0.004 0.019 um, 0.3 1.5 % Predicted X = -0.150 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.531 StdErr = 0.027 nFit = 5 nDrop = 0 Predicted Z = 4.609 StdErr = 0.021 nFit = 4 nDrop = 0 Need regular tracking - Trimming A by 25 25, reference by 25 25 Tracking image shifted 0.009, 0.018 um; position -0.159, -0.549 Record image shifted 0.000, -0.023 um Tracking reference shifted by -8.5,1.8 pixels, 0.000,-0.023 um Saved Z = 21 at 8.39 min Tilt = 18.00 Mean = 204 IA = 5.18um dose = 0.35 e/A2 X/Y/Z = -0.159 -0.526 4.609 Errors in X/Y Prediction -0.009 0.005 um, 0.7 0.4 % Predicted X = -0.140 StdErr = 0.007 nFit = 3 nDrop = 0 Predicted Y = -0.564 StdErr = 0.013 nFit = 5 nDrop = 0 Predicted Z = 4.679 StdErr = 0.024 nFit = 4 nDrop = 0 Need autofocus Measured defocus = -3.91 microns drift = 0.21 nm/sec Record image shifted 0.013, -0.006 um Saved Z = 22 at 8.77 min Tilt = 16.00 Mean = 205 IA = 5.21um dose = 0.34 e/A2 X/Y/Z = -0.152 -0.558 4.588 Errors in X/Y Prediction -0.013 0.006 um, 1.0 0.4 % Error in Z Prediction -0.091 Predicted X = -0.141 StdErr = 0.005 nFit = 3 nDrop = 0 Predicted Y = -0.599 StdErr = 0.012 nFit = 5 nDrop = 0 Predicted Z = 4.652 StdErr = 0.042 nFit = 3 nDrop = 0 Record image shifted 0.010, -0.042 um Saved Z = 23 at 9.00 min Tilt = 14.00 Mean = 200 IA = 5.24um dose = 0.34 e/A2 X/Y/Z = -0.151 -0.557 4.652 Errors in X/Y Prediction -0.010 0.042 um, 0.8 3.4 % Predicted X = -0.146 StdErr = 0.005 nFit = 3 nDrop = 0 Predicted Y = -0.564 StdErr = 0.026 nFit = 5 nDrop = 0 Predicted Z = 4.705 StdErr = 0.046 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 25 30, reference by 20 25 Tracking image shifted 0.002, 0.021 um; position -0.149, -0.584 Record image shifted 0.001, -0.031 um Tracking reference shifted by -11.2,2.2 pixels, 0.001,-0.031 um Saved Z = 24 at 9.25 min Tilt = 12.00 Mean = 201 IA = 5.26um dose = 0.34 e/A2 X/Y/Z = -0.149 -0.554 4.705 Errors in X/Y Prediction -0.003 0.010 um, 0.2 0.8 % Predicted X = -0.148 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.521 StdErr = 0.011 nFit = 5 nDrop = 0 Predicted Z = 4.758 StdErr = 0.051 nFit = 3 nDrop = 0 Need new track reference - Need autofocus Measured defocus = -3.96 microns drift = 0.23 nm/sec Record image shifted -0.004, 0.069 um Saved Z = 25 at 9.63 min Tilt = 10.00 Mean = 214 IA = 5.28um dose = 0.34 e/A2 X/Y/Z = -0.144 -0.591 4.720 Errors in X/Y Prediction 0.004 -0.069 um, 0.3 5.5 % Error in Z Prediction -0.038 Predicted X = -0.140 StdErr = 0.003 nFit = 3 nDrop = 0 Predicted Y = -0.598 StdErr = 0.039 nFit = 5 nDrop = 0 Predicted Z = 4.762 StdErr = 0.005 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 25 30, reference by 25 30 Tracking image shifted 0.006, 0.019 um; position -0.147, -0.617 Record image shifted -0.004, -0.011 um Tracking reference shifted by -3.8,2.3 pixels, -0.004,-0.011 um Saved Z = 26 at 9.93 min Tilt = 8.00 Mean = 203 IA = 5.30um dose = 0.33 e/A2 X/Y/Z = -0.143 -0.606 4.762 Errors in X/Y Prediction -0.002 -0.008 um, 0.2 0.6 % Predicted X = -0.139 StdErr = 0.003 nFit = 3 nDrop = 0 Predicted Y = -0.648 StdErr = 0.024 nFit = 5 nDrop = 0 Predicted Z = 4.805 StdErr = 0.006 nFit = 3 nDrop = 0 Record image shifted 0.005, -0.053 um Saved Z = 27 at 10.17 min Tilt = 6.00 Mean = 198 IA = 5.31um dose = 0.33 e/A2 X/Y/Z = -0.143 -0.595 4.805 Errors in X/Y Prediction -0.005 0.053 um, 0.4 4.2 % Predicted X = -0.143 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.600 StdErr = 0.037 nFit = 5 nDrop = 0 Predicted Z = 4.847 StdErr = 0.006 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 30, reference by 25 25 Tracking image shifted 0.001, 0.022 um; position -0.144, -0.622 Measured defocus = -4.09 microns drift = 0.22 nm/sec Trimming A by 25 30, reference by 25 25 Tracking image shifted -0.003, -0.001 um; position -0.141, -0.621 Record image shifted 0.001, -0.019 um Tracking reference shifted by -6.9,1.1 pixels, 0.001,-0.019 um Saved Z = 28 at 10.57 min Tilt = 4.00 Mean = 201 IA = 5.32um dose = 0.33 e/A2 X/Y/Z = -0.142 -0.602 4.940 Errors in X/Y Prediction 0.002 -0.002 um, 0.1 0.2 % Error in Z Prediction 0.092 Predicted X = -0.141 StdErr = 0.002 nFit = 3 nDrop = 0 Predicted Y = -0.577 StdErr = 0.023 nFit = 5 nDrop = 0 Predicted Z = 4.984 StdErr = 0.053 nFit = 3 nDrop = 0 Record image shifted 0.001, 0.033 um Saved Z = 29 at 10.81 min Tilt = 2.00 Mean = 209 IA = 5.32um dose = 0.33 e/A2 X/Y/Z = -0.143 -0.610 4.984 Errors in X/Y Prediction -0.001 -0.033 um, 0.1 2.6 % Predicted X = -0.142 StdErr = 0.002 nFit = 3 nDrop = 0 Predicted Y = -0.613 StdErr = 0.019 nFit = 5 nDrop = 0 Predicted Z = 5.042 StdErr = 0.059 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 25 30, reference by 25 30 Tracking image shifted 0.001, 0.007 um; position -0.142, -0.620 Record image shifted 0.000, -0.012 um Tracking reference shifted by -4.3,0.8 pixels, 0.000,-0.012 um Saved Z = 30 at 11.06 min Tilt = -0.00 Mean = 202 IA = 5.32um dose = 0.33 e/A2 X/Y/Z = -0.143 -0.608 5.042 Errors in X/Y Prediction -0.001 0.005 um, 0.1 0.4 % Predicted X = -0.145 StdErr = 0.003 nFit = 4 nDrop = 0 Predicted Y = -0.620 StdErr = 0.015 nFit = 5 nDrop = 0 Predicted Z = 5.101 StdErr = 0.065 nFit = 3 nDrop = 0 Record image shifted -0.002, -0.001 um Saved Z = 31 at 11.31 min Tilt = -2.00 Mean = 205 IA = 5.32um dose = 0.33 e/A2 X/Y/Z = -0.143 -0.619 5.101 Errors in X/Y Prediction 0.002 0.001 um, 0.2 0.1 % Predicted X = -0.142 StdErr = 0.001 nFit = 4 nDrop = 0 Predicted Y = -0.630 StdErr = 0.010 nFit = 6 nDrop = 0 Predicted Z = 5.160 StdErr = 0.072 nFit = 3 nDrop = 0 Need autofocus Measured defocus = -4.01 microns drift = 0.23 nm/sec Record image shifted 0.001, 0.047 um Saved Z = 32 at 11.68 min Tilt = -4.00 Mean = 210 IA = 5.32um dose = 0.33 e/A2 X/Y/Z = -0.142 -0.677 5.170 Errors in X/Y Prediction -0.001 -0.047 um, 0.0 3.8 % Error in Z Prediction 0.010 Predicted X = -0.142 StdErr = 0.000 nFit = 4 nDrop = 0 Predicted Y = -0.708 StdErr = 0.028 nFit = 6 nDrop = 0 Predicted Z = 5.241 StdErr = 0.032 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 25 30, reference by 25 30 Tracking image shifted 0.003, -0.012 um; position -0.145, -0.697 Record image shifted 0.001, -0.028 um Tracking reference shifted by -10.3,1.8 pixels, 0.001,-0.028 um Saved Z = 33 at 11.94 min Tilt = -6.00 Mean = 201 IA = 5.31um dose = 0.33 e/A2 X/Y/Z = -0.146 -0.669 5.241 Errors in X/Y Prediction -0.004 0.040 um, 0.3 3.2 % Predicted X = -0.150 StdErr = 0.003 nFit = 4 nDrop = 0 Predicted Y = -0.712 StdErr = 0.036 nFit = 6 nDrop = 0 Predicted Z = 5.305 StdErr = 0.035 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 25 30, reference by 25 30 Tracking image shifted -0.002, -0.005 um; position -0.148, -0.707 Record image shifted -0.000, -0.009 um Tracking reference shifted by -3.3,0.7 pixels, -0.000,-0.009 um Saved Z = 34 at 12.19 min Tilt = -8.00 Mean = 204 IA = 5.30um dose = 0.33 e/A2 X/Y/Z = -0.148 -0.698 5.305 Errors in X/Y Prediction 0.002 0.014 um, 0.1 1.1 % Predicted X = -0.151 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.728 StdErr = 0.037 nFit = 6 nDrop = 0 Predicted Z = 5.369 StdErr = 0.039 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 30, reference by 25 30 Tracking image shifted -0.000, -0.007 um; position -0.150, -0.721 Measured defocus = -3.97 microns drift = 0.17 nm/sec Trimming A by 25 30, reference by 25 30 Tracking image shifted -0.002, -0.001 um; position -0.149, -0.720 Record image shifted 0.001, -0.008 um Tracking reference shifted by -2.8,0.4 pixels, 0.001,-0.008 um Saved Z = 35 at 12.60 min Tilt = -10.00 Mean = 206 IA = 5.28um dose = 0.34 e/A2 X/Y/Z = -0.149 -0.712 5.341 Errors in X/Y Prediction 0.001 0.016 um, 0.1 1.3 % Error in Z Prediction -0.028 Predicted X = -0.150 StdErr = 0.000 nFit = 4 nDrop = 0 Predicted Y = -0.722 StdErr = 0.031 nFit = 6 nDrop = 0 Predicted Z = 5.398 StdErr = 0.002 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 24 35, reference by 24 35 Tracking image shifted 0.003, 0.012 um; position -0.153, -0.734 Record image shifted 0.000, -0.006 um Tracking reference shifted by -2.3,0.5 pixels, 0.000,-0.006 um Saved Z = 36 at 12.86 min Tilt = -12.00 Mean = 207 IA = 5.26um dose = 0.34 e/A2 X/Y/Z = -0.153 -0.728 5.398 Errors in X/Y Prediction -0.003 -0.006 um, 0.3 0.5 % Predicted X = -0.155 StdErr = 0.002 nFit = 3 nDrop = 0 Predicted Y = -0.757 StdErr = 0.023 nFit = 5 nDrop = 0 Predicted Z = 5.456 StdErr = 0.002 nFit = 3 nDrop = 0 Record image shifted 0.001, -0.038 um Saved Z = 37 at 13.10 min Tilt = -14.00 Mean = 204 IA = 5.24um dose = 0.34 e/A2 X/Y/Z = -0.156 -0.720 5.456 Errors in X/Y Prediction -0.001 0.038 um, 0.1 3.0 % Predicted X = -0.160 StdErr = 0.000 nFit = 3 nDrop = 0 Predicted Y = -0.708 StdErr = 0.010 nFit = 5 nDrop = 0 Predicted Z = 5.513 StdErr = 0.003 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 30, reference by 24 35 Tracking image shifted -0.000, 0.048 um; position -0.160, -0.756 Measured defocus = -4.04 microns drift = 0.15 nm/sec Trimming A by 25 30, reference by 24 35 Tracking image shifted -0.001, -0.002 um; position -0.158, -0.755 Record image shifted 0.000, -0.013 um Tracking reference shifted by -4.7,0.9 pixels, 0.000,-0.013 um Saved Z = 38 at 13.51 min Tilt = -16.00 Mean = 209 IA = 5.21um dose = 0.34 e/A2 X/Y/Z = -0.159 -0.742 5.555 Errors in X/Y Prediction 0.001 -0.034 um, 0.1 2.7 % Error in Z Prediction 0.042 Predicted X = -0.162 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.745 StdErr = 0.022 nFit = 5 nDrop = 0 Predicted Z = 5.612 StdErr = 0.026 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 24 35, reference by 24 35 Tracking image shifted 0.001, 0.039 um; position -0.162, -0.783 Record image shifted -0.000, -0.007 um Tracking reference shifted by -2.4,0.6 pixels, -0.000,-0.007 um Saved Z = 39 at 13.76 min Tilt = -18.00 Mean = 210 IA = 5.18um dose = 0.35 e/A2 X/Y/Z = -0.162 -0.777 5.612 Errors in X/Y Prediction -0.001 -0.032 um, 0.0 2.6 % Predicted X = -0.165 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.812 StdErr = 0.025 nFit = 5 nDrop = 0 Predicted Z = 5.676 StdErr = 0.029 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 25 30, reference by 24 35 Tracking image shifted 0.002, -0.027 um; position -0.167, -0.785 Record image shifted -0.000, -0.006 um Tracking reference shifted by -2.3,0.6 pixels, -0.000,-0.006 um Saved Z = 40 at 14.02 min Tilt = -20.00 Mean = 213 IA = 5.14um dose = 0.35 e/A2 X/Y/Z = -0.167 -0.779 5.676 Errors in X/Y Prediction -0.002 0.034 um, 0.2 2.7 % Predicted X = -0.173 StdErr = 0.000 nFit = 4 nDrop = 0 Predicted Y = -0.813 StdErr = 0.034 nFit = 5 nDrop = 0 Predicted Z = 5.740 StdErr = 0.032 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 25, reference by 24 35 Tracking image shifted -0.003, 0.017 um; position -0.170, -0.830 Measured defocus = -4.02 microns drift = 0.12 nm/sec Trimming A by 25 25, reference by 24 35 Tracking image shifted -0.001, -0.002 um; position -0.169, -0.828 Record image shifted 0.001, -0.006 um Tracking reference shifted by -2.1,0.2 pixels, 0.001,-0.006 um Saved Z = 41 at 14.44 min Tilt = -22.00 Mean = 214 IA = 5.10um dose = 0.36 e/A2 X/Y/Z = -0.169 -0.822 5.759 Errors in X/Y Prediction 0.004 -0.009 um, 0.3 0.7 % Error in Z Prediction 0.019 Predicted X = -0.173 StdErr = 0.002 nFit = 3 nDrop = 0 Predicted Y = -0.845 StdErr = 0.028 nFit = 5 nDrop = 0 Predicted Z = 5.831 StdErr = 0.005 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 24 35, reference by 30 30 Tracking image shifted 0.001, 0.035 um; position -0.174, -0.880 Record image shifted -0.001, -0.006 um Tracking reference shifted by -1.9,0.8 pixels, -0.001,-0.006 um Saved Z = 42 at 14.69 min Tilt = -24.00 Mean = 217 IA = 5.05um dose = 0.36 e/A2 X/Y/Z = -0.173 -0.875 5.831 Errors in X/Y Prediction 0.000 -0.030 um, 0.0 2.4 % Predicted X = -0.176 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.931 StdErr = 0.031 nFit = 5 nDrop = 0 Predicted Z = 5.900 StdErr = 0.006 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 25 30, reference by 30 30 Tracking image shifted 0.002, -0.041 um; position -0.178, -0.890 Record image shifted 0.000, -0.006 um Tracking reference shifted by -2.3,0.4 pixels, 0.000,-0.006 um Saved Z = 43 at 14.95 min Tilt = -26.00 Mean = 219 IA = 5.01um dose = 0.37 e/A2 X/Y/Z = -0.178 -0.884 5.900 Errors in X/Y Prediction -0.002 0.047 um, 0.2 3.8 % Predicted X = -0.183 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.932 StdErr = 0.045 nFit = 5 nDrop = 0 Predicted Z = 5.970 StdErr = 0.006 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 25 25, reference by 30 30 Tracking image shifted 0.001, -0.019 um; position -0.184, -0.913 Measured defocus = -3.99 microns drift = 0.11 nm/sec Trimming A by 25 25, reference by 30 30 Tracking image shifted -0.001, -0.003 um; position -0.183, -0.910 Record image shifted 0.001, -0.004 um Tracking reference shifted by -1.6,-0.0 pixels, 0.001,-0.004 um Saved Z = 44 at 15.36 min Tilt = -28.00 Mean = 222 IA = 4.95um dose = 0.37 e/A2 X/Y/Z = -0.184 -0.906 5.961 Errors in X/Y Prediction -0.001 0.026 um, 0.1 2.1 % Error in Z Prediction -0.009 Predicted X = -0.189 StdErr = 0.000 nFit = 3 nDrop = 0 Predicted Y = -0.905 StdErr = 0.022 nFit = 5 nDrop = 0 Predicted Z = 6.029 StdErr = 0.002 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 24 35, reference by 30 35 Tracking image shifted 0.002, 0.031 um; position -0.192, -0.936 Record image shifted -0.001, -0.005 um Tracking reference shifted by -1.7,0.7 pixels, -0.001,-0.005 um Saved Z = 45 at 15.61 min Tilt = -30.00 Mean = 225 IA = 4.89um dose = 0.38 e/A2 X/Y/Z = -0.191 -0.931 6.029 Errors in X/Y Prediction -0.001 -0.026 um, 0.1 2.1 % Predicted X = -0.197 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.938 StdErr = 0.028 nFit = 5 nDrop = 0 Predicted Z = 6.097 StdErr = 0.002 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 25 25, reference by 30 35 Tracking image shifted 0.001, 0.025 um; position -0.198, -0.962 Record image shifted 0.000, -0.005 um Tracking reference shifted by -1.8,0.3 pixels, 0.000,-0.005 um Saved Z = 46 at 15.87 min Tilt = -32.00 Mean = 228 IA = 4.83um dose = 0.39 e/A2 X/Y/Z = -0.198 -0.957 6.097 Errors in X/Y Prediction -0.002 -0.020 um, 0.1 1.6 % Predicted X = -0.205 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -0.993 StdErr = 0.007 nFit = 5 nDrop = 0 Predicted Z = 6.165 StdErr = 0.002 nFit = 3 nDrop = 0 Need autofocus Measured defocus = -3.87 microns drift = 0.08 nm/sec Record image shifted 0.002, -0.015 um Saved Z = 47 at 16.25 min Tilt = -34.00 Mean = 228 IA = 4.78um dose = 0.40 e/A2 X/Y/Z = -0.207 -0.978 6.037 Errors in X/Y Prediction -0.002 0.015 um, 0.1 1.2 % Error in Z Prediction -0.128 Predicted X = -0.215 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -1.002 StdErr = 0.004 nFit = 5 nDrop = 0 Predicted Z = 6.104 StdErr = 0.077 nFit = 3 nDrop = 0 Record image shifted 0.001, -0.006 um Saved Z = 48 at 16.49 min Tilt = -36.00 Mean = 234 IA = 4.72um dose = 0.41 e/A2 X/Y/Z = -0.216 -0.996 6.104 Errors in X/Y Prediction -0.001 0.006 um, 0.1 0.5 % Predicted X = -0.225 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -1.011 StdErr = 0.003 nFit = 5 nDrop = 0 Predicted Z = 6.151 StdErr = 0.085 nFit = 3 nDrop = 0 Need new track reference - Record image shifted 0.002, -0.006 um Saved Z = 49 at 16.73 min Tilt = -38.00 Mean = 236 IA = 4.66um dose = 0.42 e/A2 X/Y/Z = -0.226 -1.005 6.151 Errors in X/Y Prediction -0.002 0.006 um, 0.1 0.5 % Predicted X = -0.238 StdErr = 0.000 nFit = 4 nDrop = 0 Predicted Y = -1.011 StdErr = 0.002 nFit = 5 nDrop = 1 Predicted Z = 6.197 StdErr = 0.094 nFit = 3 nDrop = 0 Record image shifted -0.001, 0.018 um Saved Z = 50 at 17.05 min Tilt = -40.00 Mean = 244 IA = 4.59um dose = 0.43 e/A2 X/Y/Z = -0.237 -1.029 6.197 Errors in X/Y Prediction 0.001 -0.018 um, 0.1 1.4 % Predicted X = -0.247 StdErr = 0.000 nFit = 3 nDrop = 0 Predicted Y = -1.044 StdErr = 0.011 nFit = 5 nDrop = 0 Predicted Z = 6.243 StdErr = 0.103 nFit = 3 nDrop = 0 Need autofocus Measured defocus = -4.16 microns drift = 0.10 nm/sec Record image shifted 0.001, 0.009 um Saved Z = 51 at 17.42 min Tilt = -42.00 Mean = 247 IA = 4.52um dose = 0.44 e/A2 X/Y/Z = -0.248 -1.053 6.405 Errors in X/Y Prediction -0.001 -0.009 um, 0.1 0.7 % Error in Z Prediction 0.162 Predicted X = -0.260 StdErr = 0.001 nFit = 4 nDrop = 0 Predicted Y = -1.074 StdErr = 0.009 nFit = 6 nDrop = 0 Predicted Z = 6.437 StdErr = 0.138 nFit = 3 nDrop = 0 Need autofocus Measured defocus = -3.97 microns drift = 0.15 nm/sec Record image shifted 0.001, -0.006 um Saved Z = 52 at 17.80 min Tilt = -44.00 Mean = 247 IA = 4.44um dose = 0.46 e/A2 X/Y/Z = -0.261 -1.068 6.411 Errors in X/Y Prediction -0.001 0.006 um, 0.1 0.5 % Error in Z Prediction -0.027 Predicted X = -0.273 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -1.093 StdErr = 0.012 nFit = 5 nDrop = 0 Predicted Z = 6.523 StdErr = 0.075 nFit = 3 nDrop = 0 Need new track reference - Record image shifted -0.000, -0.010 um Saved Z = 53 at 18.05 min Tilt = -46.00 Mean = 251 IA = 4.35um dose = 0.48 e/A2 X/Y/Z = -0.272 -1.083 6.523 Errors in X/Y Prediction 0.000 0.010 um, 0.0 0.8 % Predicted X = -0.285 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -1.093 StdErr = 0.003 nFit = 5 nDrop = 0 Predicted Z = 6.603 StdErr = 0.084 nFit = 3 nDrop = 0 Record image shifted -0.000, 0.039 um Saved Z = 54 at 18.36 min Tilt = -48.00 Mean = 270 IA = 4.26um dose = 0.49 e/A2 X/Y/Z = -0.285 -1.131 6.603 Errors in X/Y Prediction 0.000 -0.039 um, 0.0 3.1 % Predicted X = -0.297 StdErr = 0.000 nFit = 3 nDrop = 0 Predicted Y = -1.157 StdErr = 0.019 nFit = 6 nDrop = 0 Predicted Z = 6.683 StdErr = 0.094 nFit = 3 nDrop = 0 Need regular tracking - Trimming A by 20 25, reference by 30 35 Tracking image shifted -0.002, 0.028 um; position -0.295, -1.185 Record image shifted 0.001, -0.008 um Tracking reference shifted by -3.0,0.4 pixels, 0.001,-0.008 um Saved Z = 55 at 18.61 min Tilt = -50.00 Mean = 253 IA = 4.16um dose = 0.51 e/A2 X/Y/Z = -0.295 -1.177 6.683 Errors in X/Y Prediction 0.001 -0.020 um, 0.1 1.6 % Predicted X = -0.307 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -1.242 StdErr = 0.014 nFit = 5 nDrop = 0 Predicted Z = 6.762 StdErr = 0.105 nFit = 3 nDrop = 0 Need autofocus Measured defocus = -3.78 microns drift = 0.11 nm/sec Record image shifted 0.001, -0.033 um Saved Z = 56 at 18.99 min Tilt = -52.00 Mean = 257 IA = 4.06um dose = 0.54 e/A2 X/Y/Z = -0.308 -1.209 6.541 Errors in X/Y Prediction -0.001 0.033 um, 0.1 2.7 % Error in Z Prediction -0.221 Predicted X = -0.320 StdErr = 0.002 nFit = 4 nDrop = 0 Predicted Y = -1.261 StdErr = 0.025 nFit = 5 nDrop = 0 Predicted Z = 6.567 StdErr = 0.026 nFit = 3 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 20 20, reference by 30 35 Tracking image shifted 0.001, -0.016 um; position -0.321, -1.245 Measured defocus = -4.33 microns drift = 0.26 nm/sec Redoing Autofocus because measured defocus is too far from prediction Measured defocus = -3.52 microns drift = 0.09 nm/sec Trimming A by 20 20, reference by 30 35 Tracking image shifted 0.001, 0.000 um; position -0.322, -1.246 Record image shifted -0.000, -0.007 um Tracking reference shifted by -2.6,0.7 pixels, -0.000,-0.007 um Saved Z = 57 at 19.50 min Tilt = -54.00 Mean = 271 IA = 3.97um dose = 0.56 e/A2 X/Y/Z = -0.322 -1.238 6.416 Errors in X/Y Prediction -0.002 0.023 um, 0.1 1.8 % Error in Z Prediction -0.151 Predicted X = -0.335 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -1.259 StdErr = 0.004 nFit = 5 nDrop = 0 Predicted Z = 6.489 StdErr = 0.094 nFit = 4 nDrop = 0 Need autofocus Measured defocus = -4.54 microns drift = 0.12 nm/sec Redoing Autofocus because measured defocus is too far from prediction Measured defocus = -4.06 microns drift = 0.07 nm/sec Record image shifted 0.002, 0.025 um Saved Z = 58 at 19.99 min Tilt = -56.00 Mean = 290 IA = 3.88um dose = 0.59 e/A2 X/Y/Z = -0.337 -1.284 7.089 Errors in X/Y Prediction -0.002 -0.025 um, 0.2 2.0 % Error in Z Prediction 0.600 Predicted X = -0.351 StdErr = 0.001 nFit = 3 nDrop = 0 Predicted Y = -1.310 StdErr = 0.013 nFit = 6 nDrop = 0 Predicted Z = 6.860 StdErr = 0.412 nFit = 4 nDrop = 0 Need autofocus Measured defocus = -4.11 microns drift = 0.05 nm/sec Record image shifted -0.004, 0.025 um Saved Z = 59 at 20.37 min Tilt = -58.00 Mean = 298 IA = 3.78um dose = 0.62 e/A2 X/Y/Z = -0.347 -1.335 6.965 Errors in X/Y Prediction 0.004 -0.025 um, 0.3 2.0 % Error in Z Prediction 0.105 Predicted X = -0.361 StdErr = 0.004 nFit = 3 nDrop = 0 Predicted Y = -1.394 StdErr = 0.007 nFit = 5 nDrop = 0 Predicted Z = 7.239 StdErr = 0.399 nFit = 4 nDrop = 0 Need regular tracking - Need autofocus Trimming A by 20 20, reference by 29 40 Tracking image shifted 0.002, -0.031 um; position -0.362, -1.363 Measured defocus = -3.98 microns drift = 0.08 nm/sec Trimming A by 20 20, reference by 29 40 Tracking image shifted 0.000, -0.001 um; position -0.362, -1.362 Record image shifted -0.002, -0.006 um Tracking reference shifted by -2.1,1.2 pixels, -0.002,-0.006 um Saved Z = 60 at 20.78 min Tilt = -59.99 Mean = 291 IA = 3.67um dose = 0.66 e/A2 X/Y/Z = -0.360 -1.356 7.216 2013/04/26 14:41 E:\data\Cindi\WTI042413_1\WTI042413_1series4.st 0 61 1852 1856 419 60.0 -60.0 2.00 REG 20.8 1x1 K2 Summit 33000 4 0.67 LD 20.0 0.0 Total dose in electrons/square Angstrom: Recording: 25.6 Tracking: 64.9 Focusing: 146.1 Tasks: 0.00 Previews: 0.0